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Precision systems

Our precision axes and precision systems are labelled with the highest degree of precision. Repeat accuracies of ±0.05 um are achieved with high-resolution displacement measurement. This high precision makes our systems suitable for applications in the semiconductor industry as well as in medical and measurement technology. Standardised types are available, which we can customise to your requirements on a modular basis. The advantages: reduced development times, fast quotations and short delivery times.
23 product(s)
Type
amax
vmax
Stroke X-axis
Stroke Y-axis
Load capacity
Repeatability
Precision (calibrated)
Flatness / 300 mm
Straightness / 300 mm
LMG3A-CB5-2CEFE4-300-300-X10C
50 5 300 300 10 ± 1 ± 3
LMG3A-CB5-2CEFE4-600-300-X10C
50 5 300 600 10 ± 1 ± 3
LMG3A-CB5-2CEFE4-600-600-X10C
50 5 600 600 10 ± 1 ± 3
LMG2A-CB5-CEFE4-300-300-X10C
50 5 300 300 10 ± 2 ± 3
LMG2A-CB5-CEFE4-600-300-X10C
50 5 300 600 10 ± 2 ± 3
LMG2A-CB5-CEFE4-600-600-X10C
50 5 600 600 10 ± 2 ± 3
LMX2C-CB5-CB8-300-300-K1AC
300 300 5 ± 1 ± 3 ± 5 ± 5
LMX2C-CB5-CB8-400-500-K1AC
500 400 5 ± 1 ± 3 ± 5 ± 5
LMX2C-CB5-CB8-500-500-K1AC
500 500 5 ± 1 ± 3 ± 5 ± 5
LMSSA2X-10S100-13S200-200-200-XBS1B0
20 1,5 200 200 ± 8 ± 8
LMSSA2X-10S100-13S200-250-250-XBS1B0
20 1,5 250 250 ± 8 ± 8
LMSSA2X-10S100-13S200-300-300-XBS1B0
20 1,5 300 300 ± 8 ± 8
LMSSA2X-10S100-13S200-350-350-XBS1B0
20 1,5 350 350 ± 8 ± 8
LMSSA2X-10S100-13S200-400-400-XBS1B0
20 1,5 400 400 ± 8 ± 8
LMSSA2X-10S100-13S200-400-450-XBS1B0
20 1,5 450 400 ± 8 ± 8
LMSSA2X-10S100-13S200-400-500-XBS1B0
20 1,5 500 500 ± 8 ± 8
LMSSA2X-13S200-20S300-200-200-XBS1B0
20 1,5 200 200 ± 8 ± 8
LMSSA2X-13S200-20S300-250-250-XBS1B0
20 1,5 250 250 ± 8 ± 8
LMSSA2X-13S200-20S300-300-300-XBS1B0
20 1,5 300 300 ± 8 ± 8
LMSSA2X-13S200-20S300-350-350-XBS1B0
20 1,5 350 350 ± 8 ± 8
LMSSA2X-13S200-20S300-400-400-XBS1B0
20 1,5 400 400 ± 8 ± 8
LMSSA2X-13S200-20S300-400-450-XBS1B0
20 1,5 450 400 ± 8 ± 8
LMSSA2X-13S200-20S300-400-500-XBS1B0
20 1,5 500 500 ± 8 ± 8