DMT

Ultra-flat rotary table with large hollow shaft. Used in semiconductor production and inspection, the extremely flat, dynamic and maintenance-free rotary axes are suitable for applications in which high accurate positioning and synchronisation quality are required. The tilt-resistant, backlash-free design achieves a high torque density despite its low height. The high-resolution encoders are available as an incremental type or with an absolute interface. The large hollow shaft allows the passage of whole wafers up to 12 inches in size or applications with transmitted light. CAD data and technical data sheets are available for download.